These instruments feature extremely high-speed measurement capabilities thanks to an ultra-high-precision scan motor.
They can also meet high-precision needs such as linearity precision.
LSM-02-A
LSM sensor developed for in-line and automated equipment.
• Measuring range: 0.005 mm to 2 mm
• Guaranteed repeatability (2σ): ±0.015 μm (ø1 mm)
• Guaranteed linearity: ±0.3 μm
• Scanning rate: 3,200 scans/s
Specifications
Order No. | 544-123 | |
Model | LSM-02-A | |
Measuring range | 0.005 to 2 mm 0.05 to 2 mm*¹ |
|
Resolution | 0.01 μm | |
Repeatability (2 σ)*² | Full range Middle range |
ø 2 mm: ± 0.03 μm*³ ø 1 mm: ± 0.015 μm*³ |
Linearity*² | ± 0.3 μm*⁵ | |
Positional error*²*⁷ | ± 0.4 μm | |
Measuring region | 1 × 2 [optical axis depth] × [scanning width] mm | |
Number of scans for averaging | 16 to 2048 scans *⁸ | |
Laser Class | Semiconductor laser: CLASS 1 (Max. output: 1.0 mW, Laser wavelength: 650 nm) | |
Scanning rate | 3200 scans/s | |
Laser scanning speed | 76 m/s | |
Protection level | IP67 | |
Distance between the emission unit and reception unit |
- | |
Operating environment | Temperature: 0 °C to 40 °C, Humidity: 35%RH to 85%RH (non-condensing) Altitude: 2000 m or less |
|
Storage temperature | Temperature: -10 °C to 50 °C, Humidity: 35%RH to 85%RH (non-condensing) | |
CE Marking / UKCA Marking | EMC Directive: EN IEC 61326-1, Immunity test requirements: Clause 6.2 Table 2 Emission limit: Class A RoHS Directive: EN IEC 63000 |
|
Standard accessory | Signal cable: 02AGQ190 CD (User's Manual): 02AGQ039 |
*1 When set to "Do not perform ultra-fine wire measurement" or "Edge specification" in the basic setup.
*2 Accuracy was inspected using a glass substrate workpiece with a vapor-deposited chromium pattern.
Environment: Temperature: 20 °C±1 °C, Humidity: 50%±10 °C
*3 Value of ±2σ when a ø2 mm/ø1 mm gage is measured for two minutes at measuring intervals of 0.32 seconds (σ: standard deviation)
*4 Value of ±2σ when a ø30 mm/ø10 mm gage is measured for two minutes at measuring intervals of 0.32 seconds (σ: standard deviation)
*5 Value obtained by measurement at the middle of the measuring range
*6 ⊿D=Difference in diameter between the master gage and workpiece. (Unit: mm)
*7 Error caused by moving a workpiece either in the optical axis direction or in the scanning direction
*8 When set to "Do not perform ultra-fine wire measurement" in the basic setup, one to eight times of averaging are available within the measuring range of 0.05 mm to 2 mm.
แบรนด์สินค้า | MITUTOYO |
---|---|
Order No. | 544-123 |
Model | LSM-02-A |
Measuring Range | 0.005 to 2 mm / 0.05 to 2 mm |
Resolution | 0.01 μm |
Repeatability (2 σ) | ø 2 mm: ± 0.03 μm ø 1 mm: ± 0.015 μm |
Linearity | ± 0.3 μm |
Positional error | ± 0.4 μm |
Measuring region | 1 × 2 [optical axis depth] × [scanning width] mm |
Number of scans for averaging | 16 to 2048 scans |
Laser class | Semiconductor laser: CLASS 1 (Max. output: 1.0 mW, Laser wavelength: 650 nm) |
Scanning rate | 3200 scans/s |
Laser scanning speed | 76 m/s |
Protection Level | IP67 |
Operating environment | Temperature: 0 °C to 40 °C, Humidity: 35%RH to 85%RH (non-condensing) Altitude: 2000 m or less |
Storage environment | Temperature: -10 °C to 50 °C, Humidity: 35%RH to 85%RH (non-condensing) |
CE Marking / UKCA Marking | EMC Directive: EN IEC 61326-1, Immunity test requirements: Clause 6.2 Table 2 / Emission limit: Class A / RoHS Directive: EN IEC 63000 |
Standard Accessories | Signal cable: 02AGQ190 CD (User's Manual): 02AGQ039 |