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FS70 - Microscope Unit | MITUTOYO

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FS70

Microscope Unit

FS70

A microscope unit with eyepieces, designed for integration with an instrument.
Supports variable magnification by employing a revolver and can be used for microfabrication with YAG lasers.

Observation image: Bright-field, Bright/Dark-field, Polarization, Differential Interference Contrast

 

FS70 - Microscope Unit | MITUTOYO
FS70 - Microscope Unit | MITUTOYO

Features

> Compact microscope unit with trinocular eyepiece tube
   (Suitable for observation of many different types of object: metal surfaces, semiconductors, LCDs, resins, etc.)
> Can used with YAG (near-infrared, visible, near-ultraviolet, or ultraviolet) lasers.*¹
   (Suitable for cutting, trimming, repair and marking of IC wiring (Au, Al), removing and processing thin-films (insulating film) and repair of color filters.)
> Compatible with infrared optical systems*²
> Product range supporting various observation methods
   (Bright-field/Dark-field/Simple polarization/Differential interference contrast (DIC))
> Equipped as standard with a Koehler illumination with aperture diaphragm for epi-illumination optical systems
> High operability with microscopes
   (Inward revolver design and long-working-distance objectives)
*1: The performance and safety of laser-equipped system products is not guaranteed.
*2: A near-infrared source and suitable camera are required.

 

SPECIFICATIONS

Standard Head
Type
Model FS70 FS70Z FS70ZD FS70L FS70L4
Order No. 378-184-1 378-185-1 (Made to Order) 378-186-1 378-187-1
Tilting Head Type Model FS70-TH FS70Z-TH FS70ZD-TH FS70L-TH FS70L4-TH
Order No. 378-184-3 378-185-3 (Made to Order) 378-186-3 378-187-3
Observation
Image
  Erect image
BF (Bright-Field)  
BD (Bright-Field/
Dark-Field)
           
Polarization
Differential
Interference
Contrast (DIC)
   
Eyepieces (Required) 10X (field number 24) ·15X (field number 16)· 20X (field number 12)
Optical
Tube
Trinocular
Tube
Field Number 24
Eye Width
Adjustment
Siedentopf, adjustable interpupillary distance range: 51 - 76 mm
Tilt Angle 0 to 20° (only for -TH), displacement of eye point: approx.114 mm
Optical Pass
Ratio
Fixed type
(Eyepiece/TV =
50/50)
Switchable type
(Eyepiece/Tube =
100/0: 0/100)
Fixed type
(Eyepiece/TV =
50/50)
Switchable type
(Eyepiece/Tube =
100/0: 0/100)
Fixed type *¹
(Eyepiece/TV =
50/50)
Switchable type
(Eyepiece/Tube =
100/0: 0/100)
Camera Port
Mount
C-mount (using optional adapter B*²)
Parfocal adjustment with adapter B
Use a laser with TV
port.
C-mount receptacle
(with green filter
switch)
(with parfocal adjustment)
Protective Filter Built-in laser beam filter
Tube Lens 1X 1X-2X zoom 1X
Laser
Port
Optical Features Magnification: 1X
λ : 355/532/1064 nm
Magnification: 1X
λ : 266/532 nm
Mount YAG laser source
(fundamental, second
and third harmonic
mode) available
YAG laser source
(second, fourth
harmonic mode)
available
Microscope
Head
Coarse and Fine
Movement
Uniaxial coarse and fine movement (Coarse: 3.8 mm/rev. fine 0.1 mm/rev.)
Movement 50 mm, left and right handle
Optical System Epi-Illumination Epi-illumination for Bright-field (Koehler illumination, with aperture diaphragm)
Illumination Unit (Optional) Fiber illumination unit (LED) (No.176-386), 150 W Fiber-optic illumination unit (No.176-316) stepless adjustment, light guide length: 1500 mm
Revolver (Required) Self-aligning manual revolver nosepiece unit Quad /
Self-aligning Power revolver nosepiece unit Quintuple
Manual revolver
nosepiece unit Quad
/ Power revolver
nosepiece unit Quad
Self-aligning manual revolver nosepiece unit Quad / Self-aligning Power revolver
nosepiece unit Quintuple
Suitable Objective
(Required)
For Observation M Plan Apo
M Plan Apo HR
M Plan Apo SL
G Plan Apo
BD Plan Apo M Plan Apo
M Plan Apo HR
M Plan Apo SL
G Plan Apo
For Laser Cutting NIR Series
NUV Series
*Select from
wavelengths used by laser source
UV Series
Loading *³ 14.5 kg 13.6 kg 14.1 kg 13.2 kg 14.1 kg
(tilting headtype:
13.2 kg)
14.2 kg
(tilting headtype:
13.5 kg)
13.9 kg
(tilting headtype:
13.1 kg)
Mass (Main Unit) 6.1 kg 7.1 kg 6.6 kg 7.5 kg 6.6 kg (tilting
headtype: 7.5 kg)
6.4 kg (tilting head
type: 7.2 kg)
6.7 kg (tilting head
type: 7.5 kg)

*1: It is a switchable type when using FS70ZD-TH (Tilting head type). *2: Installation is optional. *3: Loading on optical tube excluding weight of revolvers, objective lenses and eyepieces.

Note: When using the objective M Plan Apo 1X, using this lense with a differential interference contrast unit (No.378-092 or 378-094) is recommended.

Note: Observe the following precautions when using FS70L or FS70L4 with YAG laser source attached.
· Be aware of the laser power and energy density limitations of the optical system to avoid damage.
· Check the mass of the laser source. When mounting on a high-speed device or acceleration/deceleration device, please contact us.

 

 

 

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